S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction StdPbc-0315 SEMI E134-0924 (technical revision)

SEMI E134-0924 (technical revision)

6-0421 (technical revision)

as they first need to know and understand each other’s terminology

The leak integrity of a gas delivery system is important to maintaining product quality and performance

The presence of unwanted subsurface p-n junctions may have deleterious effects on device operation

S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction StdPbc-0315 SEMI E134-0924 (technical revision)This Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in July 2012. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are