TEL Tokyo Electron Left Right Scan Arm DEV Develop Process Station Lithius Spare Part No: 3002-01194 Model No:

Part No: 3002-01194 Model No:

ARM NP8148E030-1 1

Flange: ISO100 ISO-K to NW50

This DNS Dainippon Screen AP-1186B is used working surplus

Inventory # CONV-110

TEL Tokyo Electron Left Right Scan Arm DEV Develop Process Station Lithius Spare Part No: 3002-01194 Model No:TEL Tokyo Electron Left Right Scan Arm DEV Develop Process Station Lithius Spare Model No: Left Right DEV Scan Arm Assembly DEV Develop Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Parts List (approximation, parts may vary) Assembly Part No: 5087 400475 16, ARM(L) ASSY 5010 302038 11 BASE,SCAN 1 5010 304964 11 BASE 1 2910 414906 12 BLOCK,BELT 1 5010 400223 11 CLAMP,BELT 1 5010 401999 11 SENSOR SHUTTER 1 5010 304965 11