M02300 - SEMI M23 - 鏡面単結晶インジウムリンウェーハの仕様 Revision:SEMI M23-0703 - Superseded This Standard is intended to

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and their interchangeability at all mechanical interfaces

注意：在此指導方針中所稱"應該"條款之一致性必須宣告與本文件之一致性，所稱"可能"、"建議"、"首選"、"推薦"、"注意"或"相關資訊"條款則並不一定要宣告其一致性。

and one of the Sensor/Actuator Network Communication Specifications

This specification defines the acceptance criteria for cofired ceramic pin grid array packages

orgで入手可能になり，2003年3月発行に至る。初版は1982年発行，前版は1996年12月発行。

M02300 - SEMI M23 - 鏡面単結晶インジウムリンウェーハの仕様 Revision:SEMI M23-0703 - Superseded This Standard is intended toSEMI M23SEMI M23. 60703 Subordinate Standards: SEMI M23. 1 0600 50 mm SEMI M23. 2 1000 3(76. 2mm) SEMI M23. 3 0600 SEMI M23. 4 0999 100 mm SEMI M23. 5 1000 100 mm V GROOVE SEMI M23. 6 0703 150 mm Referenced SEMI Standards SEMI M39 Test Method for Measuring Resistivity and Hall Coefficient and Determining Hall Mobility on Semi Insulating GaAs Single Crystals