D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25

SEMI C2 — Specifications for Etchants

The nominal volume of the canister which is over 40 liters is exempted from the scope

The growing volume of production of poly-Si and sog-Si requires also an increase of quality control for these materials

2% (1 × 1020 atoms/cm3) for oxygen

D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 This edition was approved forglobal Flat Panel Display Color Filters & Optical Elements Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM1995200111 FPDCFCF Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D20 Terminology for FPD Mask Defect SEMI D21 Terminology for FPD Mask Pattern Accuracy SEMI M21 Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array