M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current SEMI MF84 — Test Method

SEMI MF84 — Test Method for Measuring Resistivity of Silicon Slices with a Collinear Four-Probe Array

diatomic gas comprising approximately 78% of the earth’s atmosphere

Wafers must be accurately aligned in various processing equipment during integrated circuit manufacture

electrical measurement

The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard

M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current SEMI MF84 — Test MethodThe purpose of this Test Method is to specify methods for the contactless measurement of the resistivity of semi insulating samples and wafers. This Test Method covers the determination of the electrical resistivity of semi insulating semiconductors, including GaAs, InP, CdTe, Cd(Zn)Te, SiC, GaN, and AlN, within the resistivity range 1E5 to 1E12 cm. It may also be used to characterize other materials exhibiting resistivity in this range, including in