E01700 - SEMI E17 - マスフローコントローラの過渡特性テストのガイド StdPbc-0118 SEMI D19-1019 (technical revision)
$115.50
Description
SEMI D19-1019 (technical revision)
org에서 2012년 3월부터 이용 가능하다
the actual wafer diameter may differ slightly due to process requirements
4 This Test Method covers determination of repeatability over a period of one week
Similar requirements and options covering load ports for wafers are covered in SEMI E15 (for 200 mm wafers and smaller) and in SEMI E15
E01700 - SEMI E17 - マスフローコントローラの過渡特性テストのガイド StdPbc-0118 SEMI D19-1019 (technical revision)global Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1991 20073 MFC Referenced SEMI Standards None.
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