M01300 - SEMI M13 - シリコンウェーハの英数字マーキングの仕様 Revision:SEMI M13-0706 - Superseded The scope of this Standard

The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model

as defined in ¶ 5

and important electrical parameters such as delivered power

specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDMs)

The adaptation describes a method for performing the test method on coupons or wetted surface sections cut from gas supply system components such as tubing

M01300 - SEMI M13 - シリコンウェーハの英数字マーキングの仕様 Revision:SEMI M13-0706 - Superseded The scope of this Standardglobal Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20067CD ROM1988200311 OCR Referenced SEMI Standards None.