A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) Revision:SEMI A1-1025 - Current + Redline this document specifies a simple

this document specifies a simple and practical method for commercial semi-insulating GaAs single crystals

메소드(Method)가 레시피 가변 매개변수(recipe variable parameters)들을 이용하기 위해 정의되지만

Extreme & Optimality

SEMI E125-0310 (technical revision)

SEMI C23-0708 (technical revision)

A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) Revision:SEMI A1-1025 - Current + Redline this document specifies a simple* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1