T01000 - SEMI T10 - 二次元データマトリクス直接マーク品質を評価する試験方法 Revision:SEMI T10-0701 (Reapproved 0912) - Superseded ULSI and other devices have

ULSI and other devices have been increasingly miniaturized and integrated

storage or archiving of substrate maps

This Safety Guideline may also be used by the users of such equipment and by other interested parties to assess and compare the described risks of various equipment designs or in the design and evaluation of ancillary equipment or modifications

Two representative two-wafer stacks are depicted in Figure 1 and Figure 2

SEMI E142-0224E (editorial revision)

T01000 - SEMI T10 - 二次元データマトリクス直接マーク品質を評価する試験方法 Revision:SEMI T10-0701 (Reapproved 0912) - Superseded ULSI and other devices haveglobal Traceability Technical Committee2012830global Audits and Reviews Subcommittee20129www. semiviews. org www. semi. org2001720073 , Referenced SEMI Standards None.