E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded is essential to successful implementation

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In addition to the information embodied in this Standard

This Standard specifies measurement conditions and methods for describing the visual color quality in three-dimensional (3D) color space

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E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded is essential to successful implementationThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any