E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded SEMI E134 — Specification for

SEMI E134 — Specification for Data Collection Management

SEMI G90 — Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes

Factory components include applications used to manufacture devices

single-in-line

SEMI D6 — Standard Edge Length and Thickness for Flat Panel Display Mask Substrates

E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded SEMI E134 — Specification forThis Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.