E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers StdTpc-XML org June 2003

org June 2003

1  The purpose of this Standard is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards

ESD events also cause electromagnetic interference (EMI)

and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods

SEMI E43 — Recommended Practice for Electrostatic Measurements on Objects and Surfaces

E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers StdTpc-XML org June 2003This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at www. semiviews. org and www. semi. org in June 2016; originally published in 1996; previously published November 2010. This Standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer