MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 the customer may want to

the customer may want to reference SEMI M1

it is recognized that more stringent or additional specifications and procedures might be required

The goal of information security (Confidentiality

注意：　本文書は，編集上の修正を伴って，再承認された。

disk drives

MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 the customer may want toThis Test Method covers the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface. Calculation of the TIS, called Haze in some industries, is defined. This Test Method is particularly applicable to clean, optically smooth, front surface reflectors, such as semiconductor wafers, computer disk substrates, and mirrors, because under certain conditions the measured signals can be related to