E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded 1 The scope of the

1 The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link

the value (assay or purity) shall be expressed as a minimum permissible limit

Semiconductor process technology continues to move toward smaller product geometries

The purpose of this Specification is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards

SEMI E116-0704 (technical revision)

E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded 1 The scope of theThe purpose of this Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader Writer to an upstream controller. A standard interface will increase interchangeability of Carrier ID Reader Writers so that users and equipment suppliers have a wider range of choices. This Standard addresses the functional requirements for a generic Carrier ID Reader Writer