S01800 - SEMI S18 - 可燃性シリコン化合物の環境，健康，安全に関するガイドライン StdPbc-0823 This Test Method is intended

This Test Method is intended primarily for use on electronic materials in the form of nominally circular edge-contoured wafers with flat lengths up to 65 mm

and SEMI E137

1-1107 (technical revision)

originally published in 1994

The order of the data items may be restricted by an application document

S01800 - SEMI S18 - 可燃性シリコン化合物の環境，健康，安全に関するガイドライン StdPbc-0823 This Test Method is intendedglobal Environmental Health & Safety Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org200211 : 2011 FPDPV 1 Referenced SEMI Standards SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components SEMI F5 Guide for Gaseous Effluent Handling SEMI F6 Guide for Secondary Containment of Hazardous Gas Piping Systems SEMI S1 Safety Guideline for Equipment Safety Labels SEMI S2