E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Revision:SEMI E30-95 - Superseded This Specification provides a common

This Specification provides a common set of constructs that can be used by the equipment manufacturer to model their equipment structure and related elements

but rather attempts to define the measurands clearly

since non-planarity of the wafers can lead to problems in subsequent processing steps

because under certain conditions the measured signals can be related to bandwidth limited values of the rms microroughness of the surface

SEMI E87-0312 (technical revision)

E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Revision:SEMI E30-95 - Superseded This Specification provides a common* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1