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G00600 - SEMI G6 - 検査方法 封止リング平坦度 StdTpc-Physical Interfaces and tubing as specified in

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and tubing as specified in ASTM A269 and ASTM A632

This Test Method covers the determination of total sodium

very small densities of these impurities (»1010 atoms/cm3) reduce the carrier recombination lifetime and adversely affect device and circuit performance

This Specification covers dimensional

SEMI M23-0811 (Reapproved 0218)

G00600 - SEMI G6 - 検査方法 封止リング平坦度 StdTpc-Physical Interfaces and tubing as specified in38. 382 mm0. 330 8. 382 mm0. 330 Referenced SEMI Standards None.

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