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S01600 - SEMI S16 - 製品寿命時の環境影響を削減するための半導体製造装置設計ガイド Revision:SEMI S16-0307 (Reapproved 0812) - Inactive Measurements on these structures may

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Description

Measurements on these structures may give erroneous indications of conductivity type

Data Types

The properties of the films depend in part on the properties of the substrates used

SEMI E82-0305 (technical revision)

SEMI G63-95 (first published)

S01600 - SEMI S16 - 製品寿命時の環境影響を削減するための半導体製造装置設計ガイド Revision:SEMI S16-0307 (Reapproved 0812) - Inactive Measurements on these structures mayNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental Health & Safety Global Technical Committee2012618global Audits and Reviews Subcommittee20128www. semiviews. org www. semi. org2000620073 NOTICE: This Standard or Safety Guideline has an Inactive Status because the

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