E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdPbc-0423 1 The scope of this

1  The scope of this Specification and Guide is two Grades and three Tiers of sulfuric acid used in the semiconductor industry

The first part (§§ 1 through 8) specifies the SAN enabling protocol as well as the presentation (i

3-0698 (Reapproved 0615)

SEMI C88-0815 (first published)

which is biologically and ecologically very hazardous

E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdPbc-0423 1 The scope of thisThis standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. Originally published in 1992; previously published July 2004. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of this standard is to prevent any opening or closing of