C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive SEMI E154 — Mechanical Interface

SEMI E154 — Mechanical Interface Specification for 450mm Load Port

원본은 1992년에 발행되었고

Other measurement techniques may also provide similar information about the waviness of a wafer as compared to this Test Method

a Standard for monitoring UPW

and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods

C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive SEMI E154 — Mechanical InterfaceThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at www. semi. org in February 2006. Originally published 1978; previously published June 1999. NOTICE: This document was completely rewritten in 2006. The purpose of this document is to standardize requirements for dichloromethane (methylene