E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 Both user and supplier of
$115.50
Description
Both user and supplier of the minienvironment shall agree upon all important parameters defined in this Test Method
SEMI T20-0710 (Reapproved 0322)
The space required for pod handling per SEMI E47 is considered
customers of such substrates will find that these specifications are useful guides in defining their requirements
SEMI M40-0200 (first published)
E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 Both user and supplier ofglobal Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment
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