G03800 - SEMI G38 - Test Method for Still- and Forced-Air Junction-to-Ambient Thermal Resistance Measurements of Integrated Circuit Packages StdPbc-1111 high-resolution mechanical stylus systems

high-resolution mechanical stylus systems

ここに説明する測定方法は，半導体製造環境における物体および表面上の一般的な静電気電荷，電圧，電界レベル，および静電気放電 (ESD) の特性を表すために利用できる。本書では，適用可能な装置，校正，および測定技術を説明している。付属書には，機器の具体例および校正手順に関する予備情報に加えて有益な一般的静電気調査に関する情報および助言を含んでいる。

12-89 (technical revision)

org in November 2016

colorless gas

G03800 - SEMI G38 - Test Method for Still- and Forced-Air Junction-to-Ambient Thermal Resistance Measurements of Integrated Circuit Packages StdPbc-1111 high-resolution mechanical stylus systemsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Test Method is to determine the thermal resistance of integrated circuit packages using thermal test chips. This Test Method deals only with junction to ambient measurements of thermal resistance and