D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdTpc-Flat Panel Display SEMI F38 — Test Method

SEMI F38 — Test Method for Efficiency Qualification of Point-of-Use Gas Filters

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies

AFM uses a stylus or probe tip that interacts with the surface of interest and moves at a known speed across the surface while recording the up and down movement of the tip relative to the surface

SEMI E30-0600 (technical revision)

SEMI D3 — Quality Area of FPD Substrates

D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdTpc-Flat Panel Display SEMI F38 — Test MethodPlastic films substrates for flexible displays change their dimensions by temperature and humidity. Also their dimensions will change by time after heat treatment, water treatment, etc. This Standard provides procedures for the measurement environmental condition to measure dimensions of plastic films substrates. This Standard provides guidance for measuring dimensions of plastic films substrates for electronic devices. Referenced SEMI Standards