P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces SEMI E70-0298 (first published)

SEMI E70-0298 (first published)

without dependence on operator or host input

注意：　本文書は，SEMI E54一連のスタンダードとして出版されず，単独で発行および販売される。

There are differing parameters for analysis already widely in use

All parts of the tube fittings tested by this method in contact with the internal fluid are made of fluorocarbon materials

P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces SEMI E70-0298 (first published)This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 1, 2013. Available at www. semiviews. org and www. semi. org in June 2013; originally published November 2001; previously published November 2009. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not