MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 SEMI MF1809 — Guide for

SEMI MF1809 — Guide for Selection and Use of Etching Solutions to Delineate Structural Defects in Silicon

The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry

as well as complex control devices such as robots

SEMI M1-1109 (technical revision)

本法は，以下に述べる条件のもとで得たテストデータをベースにして，チューブフィッティングの性能を決定するために使用することが出来る。しかし，その結果は性能レーティングを意図するものではない。

MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 SEMI MF1809 — Guide for1 Purpose 1. 1 This Specification provides the standard pitch dimensions for developers of microfluidic devices. 2 Scope 2. 1 This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly. Referenced SEMI Standards (purchase separately) None. Revision History SEMI MS11 0318 (Reapproved 0525) SEMI MS11 0318 (first published)