E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology This Specification describes the volume

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

This standard defines the concepts required for management of recipes

This Practice is intended for use with all silicon wafer sizes and types when measuring uniformity of film properties and characteristics

The surface characterization tests to be performed are specified herein

SEMI E70-1213 (technical revision)

E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology This Specification describes the volumeglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.