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G00300 - SEMI G3 - 仕様 側面ろう付け積層板 Revision:SEMI G3-90 - Inactive SEMI E114-0302E (Reapproved 0923)
G00300 - SEMI G3 - 仕様 側面ろう付け積層板 Revision:SEMI G3-90 - Inactive SEMI E114-0302E (Reapproved 0923)
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Description
SEMI E114-0302E (Reapproved 0923)
This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19
SEMI MF1723 –– Practice for Evaluation of Polycrystalline Silicon Rods by Float-zone Crystal Growth and Spectroscopy
Water absorption (see SEMI G75
本文書の目的は，半導体産業で使用されるシラン(SiH4)の仕様を提供するものである。
G00300 - SEMI G3 - 仕様 側面ろう付け積層板 Revision:SEMI G3-90 - Inactive SEMI E114-0302E (Reapproved 0923)CurrentInactiveInactiveSEMI 7. 62 mm (0. 003 in.)10. 16 mm (0. 400 in.)15. 24 mm (0. 600 in.)22. 86 mm (0. 900 in.) Referenced SEMI Standards None.
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