MF015400 - SEMI MF154 - Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces StdPbc-1021 orgおよびwww

orgおよびwww

org September 2002

SEMI MF1726-1110 (technical revision)

Roughness nomenclature is intended to remove ambiguities with respect to identifying the roughness measurements used and the results achieved

the necessity to meet new demands such as single substrate transfer has been increasing

MF015400 - SEMI MF154 - Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces StdPbc-1021 orgおよびwwwThe purpose of this Guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Ambiguities and uncertainties regarding surface defects may be resolved by reference to this Guide. There is close alignment between this Guide and common specifications used for the purchase of silicon wafers. This Guide contains a compilation of the most commonly observed