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S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded SEMI E88-0704 (technical revision)
S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded SEMI E88-0704 (technical revision)
$193.00
Description
SEMI E88-0704 (technical revision)
This Standard applies to different device configurations ranging from single integrated circuits to multi-chip/3D structures
SEMI E142-0211 (Reapproved 1016)
SEMI F22 — Guide for Gas Distribution Systems
Parameters such as edge length and diagonal of a wafer appear to be obvious
S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded SEMI E88-0704 (technical revision)2010122120112www. semiviews. orgwww. semi. org199820093 : (transferor)(transferee) (ESH) Referenced SEMI Standards SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S16 Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
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