M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220 Furnace Grade used in the

Furnace Grade used in the semiconductor industry and testing procedures to support those standards

previously published January 2017

8-0698 (Reapproved 0615)

The SEMI World Fab Watch report is a powerful and comprehensive database of 1000-plus fabs

SEMI E122-0703 (Reapproved 1109)

M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220 Furnace Grade used in theA number of device manufacturers utilize silicon annealed wafers to gain improved device characteristics. This Specification provides information for developing specifications for silicon annealed wafers used to fabricate semiconductor devices and integrated circuits. This Specification covers dimensional, electrical, chemical, and structural properties of silicon annealed wafers for 180 nm, 130 nm, 90 nm, (Table R1 1), 65 nm, 45 nm, 32 nm, (Table R1