E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded The specific format and protocol

The specific format and protocol implementation of these interface specifications

SEMI M9 — Specification for Polished Monocrystalline Gallium Arsenide Slices

SEMI C27 — Specifications and Guidelines for Hydrochloric Acid

such as pellets of perfluoroalkoxy (PFA)

本スタンダードは，Gases Global Technical Committeeで技術的に承認されている。現版は2011年9月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年11月にwww

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded The specific format and protocolNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)