E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 • Equipment and load port

• Equipment and load port access mode switching

5-1104 (technical revision)

The interface specified in this Standard can be for a sealed mini-environment

APIMS is currently the method of choice for such dynamic tests because it is the commercially available technique capable of ppt moisture analysis with the fastest response time

000 defects per cm2

E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 • Equipment and load portThis standard was technically approved by the global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1992; last published June 1999. NOTICE: This document was