E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests StdTpc-Equipment Models • Error indication

• Error indication

This Test Method applies to all type of high purity gas delivery systems used in semiconductor manufacturing facilities and comparable research and development areas

as when pulled down onto an ideally clean flat chuck

alpha-terpinine

SEMI MF1529-02 (first SEMI publication)

E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests StdTpc-Equipment Models • Error indication1 Purpose 1. 1 The purpose of this Standard is to provide a test method for measurement of mass flow controller (MFC) transient characteristics. 2 Scope 2. 1 This Standard is intended to establish a common basis for communication between users and suppliers of semiconductor equipment. It provides terminology and methodology aimed at eliminating confusion regarding what previously has been referred to as MFC response time. The conditions and procedures