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F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様 Revision:SEMI F19-0304 (Reapproved 0310) - Superseded These defects are influenced directly
F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様 Revision:SEMI F19-0304 (Reapproved 0310) - Superseded These defects are influenced directly
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Description
These defects are influenced directly by contamination
表面粗さ限度
Initially available at www
SEMI E134-0319 (technical revision)
本文書は長方形の
F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様 Revision:SEMI F19-0304 (Reapproved 0310) - Superseded These defects are influenced directlyglobal Gases Committee20091216global Audits and Reviews Subcommittee20102www. semi. org1995220043 SEMI F20 Referenced SEMI Standards SEMI F20 Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate, and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications SEMI F37 Method for Determination of Surface Roughness Parameters for Gas Distribution System Components SEMI F60 Test Method for ESCA Evaluation
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 - Superseded These defects are influenced directly){kind=link}
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