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Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE weekly and regular control
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE weekly and regular control
$166.00
Description
weekly and regular control
detection and suppression systems
g) liberated gases
This Part of this European Standard specifies requirements for firing systems for oil and gaseous fuels applicable to shell boilers
Constructional requirements
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE weekly and regular controlWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
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