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Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon Ingestion-build-177197 A revision of the abrasion1 Scope This International Standard specifies a secondary ion mass spectrometric method using magnetic sector or quadrupole mass spectrometers for depth profiling of arsenic in silicon, and using stylus profilometry or optical interferometry for depth calibration. This method is applicable to single crystal, poly crystal or amorphous silicon specimens with arsenic atomic concentrations between 1 1016 atoms cm3 and 2,5 1021 atoms cm3, and to crater