Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-84997 BS EN ISO 8185 also

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Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials Ingestion-build-84997 BS EN ISO 8185 also1 Scope This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin film micro electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 m.